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Diagnostic Techniques for Semiconductor Materials Processing: Volume 406 (MRS Proceedings)

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The fabrication of Si- and compound semiconductor-based devices involves a number of steps ranging from material growth to pattern definition by lithography, and ultimately, pattern transfer by etching/deposition. The key to device manufacturing, however, is reproducibility, low cost and high yield. Diagnostic techniques allow correlation between processing and actual device performance to be established. Researchers from universities, industry and government come togeth...

You can specify the type of files you want, for your device.Diagnostic Techniques for Semiconductor Materials Processing: Volume 406 (MRS Proceedings)   |  From Materials Research Society. A good, fresh read, highly recommended.

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