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| #3137022 in Books | 1996-01-12 | Original language:English | PDF # 1 | 9.75 x6.75 x1.25l, | File type: PDF | 726 pages||16 of 16 people found the following review helpful.| Not a book but a collection of review articles|By A Customer|The problem with the book is that it is not a book at all: it is a collection of 12 articles which vary enormously in their style and level. Some are excellent, like Richard Fair's RTP chapter, but many are run-of-the-mill reviews. A welcomed addition is that wafer cleaning and clean room technology have chapters
The first textbook to be published for this subject area, this text is aimed at senior level and graduate courses in ULSI technology. This text follows the tradition of Sze's highly successful pioneering text on VLSI technology, and is updated with the latest advances in the field of microelectronic chip fabrication. Since computer chips are foundations of modern electronics, these topics are essential for the next generation of USLI technologies, allowing more transisto...
You can specify the type of files you want, for your device.ULSI Technology | From Mcgraw-Hill College. Which are the reasons I like to read books. Great story by a great author.
