[PDF.46kx] Polymers in Microlithography: Materials and Processes (ACS Symposium Series)
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Polymers in Microlithography: Materials and Processes (ACS Symposium Series)
From Brand: American Chemical Society
[PDF.mf29] Polymers in Microlithography: Materials and Processes (ACS Symposium Series)
Polymers in Microlithography: Materials From Brand: American Chemical Society epub Polymers in Microlithography: Materials From Brand: American Chemical Society pdf download Polymers in Microlithography: Materials From Brand: American Chemical Society pdf file Polymers in Microlithography: Materials From Brand: American Chemical Society audiobook Polymers in Microlithography: Materials From Brand: American Chemical Society book review Polymers in Microlithography: Materials From Brand: American Chemical Society summary
| #3804390 in Books | American Chemical Society | 1989-05-05 | Ingredients: Example Ingredients | Original language:English | PDF # 1 | 9.10 x1.10 x6.00l,1.60 | File type: PDF | 433 pages | ||About the Author|Elsa Reichmanis is at ATandT Bell Laboratories. Scott A. MacDonald is at Almaden Research Center.
This volume examines the role polymeric materials play in the electronics industry, with special emphasis on recent advances in the science and technology of resist materials and processing for microlithography. It provides the reader with an appreciation for the diversity of chemical research efforts that are required for the development of new resist materials and processes. Its 26 chapters are divided into three sections covering chemically applied resist chemistry, m...
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