[PDF.48hf] Plasma-Surface Interactions and Processing of Materials (Nato Science Series E:) (Volume 176)

Plasma-Surface Interactions and Processing of Materials (Nato Science Series E:) (Volume 176)

[PDF.cs36] Plasma-Surface Interactions and Processing of Materials (Nato Science Series E:) (Volume 176)

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 | #7115736 in Books |  Ingramcontent |  2011-10-01 |  2011-10-01 | Original language:English | PDF # 1 |  9.25 x1.30 x6.10l,1.75 | File type: PDF | 558 pages

 | Plasma Surface Interactions and Processing of Materials Nato Science Series E Volume 176

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An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space.
The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and pl...

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