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Microelectronic Processing: Chemical Engineering Aspects (ACS Advances in Chemistry)

From Brand: American Chemical Society




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 | #2502438 in Books |  American Chemical Society |  1989-05-05 | Original language:English | PDF # 1 |  6.10 x1.30 x8.90l,1.95 | File type: PDF | 524 pages

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Although chemical engineering principles are at the heart of solid state process technology, until now no reference volume addressing this relationship was available. This is the first book of its kind to tie fundamental engineering concepts to solid state process technology. Discussing the basic concepts involved--liquid-phase epitaxy, physical and chemical vapor deposition, diffusion and oxidation in silicon, resists in microlithography, etc.--this volume will be parti...

You can specify the type of files you want, for your gadget.Microelectronic Processing: Chemical Engineering Aspects (ACS Advances in Chemistry)   |  From Brand: American Chemical Society.Not only was the story interesting, engaging and relatable, it also teaches lessons.

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