[PDF.70xm] Microelectronic Materials and Processes (Nato Science Series E:)

Microelectronic Materials and Processes (Nato Science Series E:)

[PDF.ge30] Microelectronic Materials and Processes (Nato Science Series E:)

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 | #6985080 in Books |  Springer |  1989-01-31 | Original language:English | PDF # 1 |  9.21 x2.06 x6.14l,3.44 | File type: PDF | 1000 pages

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The primary thrust of very large scale integration (VLS!) is the miniaturization of devices to increase packing density, achieve higher speed, and consume lower power. The fabrication of integrated circuits containing in excess of four million components per chip with design rules in the submicron range has now been made possible by the introduction of innovative circuit designs and the development of new microelectronic materials and processes. This book addresses the l...

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