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Laser Microfabrication: Thin Film Processes and Lithography

From Daniel J Ehrlich




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 | #5408344 in Books |  Daniel J Ehrlich |  1989-06-11 | Original language:English | PDF # 1 |  9.02 x1.31 x5.98l,2.47 | File type: PDF | 587 pages

 | Laser Microfabrication

|| |A good balance between science and practice, well-established and very new data....The importance of this monograph lies in the title itself, since microelectronics today is a driving force of progress in science and technology....I think that anyone who wants

This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.



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