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Ion Beams in Materials Processing and Analysis

Bernd Schmidt, Klaus Wetzig




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 | #5503753 in Books |  2012-12-14 | Original language:English | PDF # 1 |  9.20 x1.10 x6.30l,2.10 | File type: PDF | 418 pages

||From the Back Cover||A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and

A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning is treated in detail. Its applications in materials research, development and analysis, developments of special techniques and interaction mechanisms of ion beams with solid state matter result in the optimization of n...

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