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Introductory MEMS: Fabrication and Applications

Thomas M. Adams, Richard A. Layton




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 | #5195268 in Books |  2014-09-07 |  2014-09-07 | Original language:English | PDF # 1 |  9.25 x1.04 x6.10l,1.41 | File type: PDF | 444 pages

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This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested pedagogical structure and an accessible writing style.



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