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Handbook of VLSI Microlithography, Second Edition

John N. Helbert




[PDF.lf06] Handbook of VLSI Microlithography, Second Edition

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 | #4238507 in Books |  Wiley-Interscience |  2002-01-14 | Original language:English | PDF # 1 |  9.02 x2.06 x5.98l,3.24 | File type: PDF | 1022 pages

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||From the Publisher|For workers in the Very Large Scale Integrated Circuit (VLSI) industry involved with production of high density integrated circuit semiconductors such as DRAM -- including production engineers, research and development scientists and technicia

This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatingsùincluding optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off wi...

You easily download any file type for your gadget.Handbook of VLSI Microlithography, Second Edition   |  John N. Helbert. Which are the reasons I like to read books. Great story by a great author.

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