[PDF.63yu] Handbook of Advanced Plasma Processing Techniques

Handbook of Advanced Plasma Processing Techniques

[PDF.to11] Handbook of Advanced Plasma Processing Techniques

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 | #5553059 in Books |  2012-11-01 | Original language:English | PDF # 1 |  9.21 x1.35 x6.14l,2.04 | File type: PDF | 655 pages

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||From the Back Cover|This volume covers the topic of advanced plasma processing techniques, from the fundamental physics of plasmas to diagnostics, modeling and applications such as etching and deposition for microelectronics. The use of plasmas for patterning on

Pattern transfer by dry etching and plasma-enhanced chemical vapor de­ position are two of the cornerstone techniques for modern integrated cir­ cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen­ sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the...

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