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Fundamental Electron Interactions with Plasma Processing Gases (Physics of Atoms and Molecules)

Loucas G. Christophorou, James K. Olthoff




[PDF.lp28] Fundamental Electron Interactions with Plasma Processing Gases (Physics of Atoms and Molecules)

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 | #7200460 in Books |  2003-12-31 | Original language:English | PDF # 1 |  9.21 x1.69 x6.14l,3.68 | File type: PDF | 781 pages

||2 of 2 people found the following review helpful.| Phenomenal|By PParker|This is a marvelous book. I have never found a more perfect text for the topic of discussion. A wonderfully informative and surprisingly fun read.

This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro­ vides an up-to-date and comprehensive account of the fundamental in­ teractions of low-energy electrons with molecules of current interest in modern technology, especially the semiconductor industry. The primary electron-molecule interaction processes of elastic and in­ elastic electron scattering, electron-impact ionization...

You easily download any file type for your device.Fundamental Electron Interactions with Plasma Processing Gases (Physics of Atoms and Molecules)   |  Loucas G. Christophorou, James K. Olthoff. Which are the reasons I like to read books. Great story by a great author.

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