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Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies (Nato Science Series II:)

From Brand: Kluwer Academic




[PDF.rs97] Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies (Nato Science Series II:)

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 | #7867075 in Books |  Kluwer Academic |  2002-04-30 | Original language:English | PDF # 1 |  9.21 x.86 x6.14l,1.33 | File type: PDF | 363 pages

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An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface che...

You easily download any file type for your gadget.Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies (Nato Science Series II:)   |  From Brand: Kluwer Academic. I have read it a couple of times and even shared with my family members. Really good. Couldnt put it down.

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